材料期刊网

Microstructural study on multilayer FeTaN/TaN (5) films

Materials Letters

The microstructure of [FeTaN/TaN](5) multilayer films has been investigated by transmission electron microscopy (TEM) and high-resolution electron microscopy (HREM) in cross section and plan view. Each layer shows a small surface roughening less than 1 nm. The FeTaN layers are composed of b.c.c. Fe with Ta incorporated substitutionally and N interstitially, denoted as Fe(Ta,N); while the TaN layers mainly consist of f.c.c. TaN phase. A [110] texture of Fe(Ta,N) has been formed in the FeTaN layers. The columnar grain structure is a typical feature in FeTaN layers. (C) 2003 Elsevier Science B.V. All rights reserved.

关键词: microstructure;thin films;magnetic materials;transmission electron;microscopy (TEM);sputtering;fetan thin-films;magnetic-properties;recording-heads;tantalum;nitride;temperature